Plasma Etcher Power Demystified

Plasma Etcher Power Basics
Pawa bilong wanpela 'plasma etcher' i olsem 'accelerator' bilong kar, na i save makim stret spit na dip bilong 'etcher'. Taim pawa i go antap, 'plasma density' i go antap na 'etching rate' i go hariap. Tasol, bikpela pawa i no gutpela oltaim; em i mas stretim bihainim ol samting na proses bilong en.

Liklik pawa (100-300W): Em i gutpela long mekim gutpela 'etching' na i no bagarapim ol samting.

Namel pawa (300-600W): Em i save skelim 'etch rate' na 'selectivity'.

Bikpela pawa (600W na antap): Ol i save yusim long rausim hariap planti samting.

Impak bilong pawa long ol risal bilong 'etching'

Ol liklik senis long pawa inap long kamapim bikpela senis long ol risal bilong 'etching':

Etching rate: Olgeta 100W inkris long pawa i save apim reit long samting olsem 15-20%.

Selektiviti: Bikpela pawa inap long daunim proteksen bilong mask.

Yunifomiti: Ol senis long pawa inap long kamapim ol 'etching depth' we i no wankain.

Ol samting we i kamap bihain long en: Pawa i save senisim kemistri bilong plasma, na i save senisim ol kain samting i kamap long en.

Ol bikpela samting long pawa optimaisesen

Long kisim gutpela 'etching' risalt, ol i mas tingim ol dispela samting:

Kain ges: Ol narapela narapela ges i nidim wanpela spesifik pawa reinj.

Presa bilong rum: Ol senis long presa i nidim ol senis long pawa.

Tempereja bilong sabstret: Pawa inap long go daun taim tempereja i go antap.

Spesing bilong ol 'electrode': Sapos spes bilong en i liklik, orait pawa bilong en i liklik.